Project Period
September 15, 1994-August 31, 1999
Level of Access
Open-Access Report
Grant Number
9413763
Submission Date
4-3-2000
Abstract
A state-of-the-art advanced materials synthesis and processing facility focusing on the growth and fabrication of ceramic- based thin film materials will be funded with the assistance of the Academic Research Infrastructure Program. The facility will include a multi-technique thin film materials synthesis chamber equipped with a microwave plasma source, effusion cells, electron beam evaporators, magnetron sputter sources, and a Kauffman ion source. Characterization capabilities will include in-situ reflection high energy electron diffraction (RHEED), mass spectrometry for controlling growth processes, X-ray photoelectron spectroscopy (XPS), and a novel Hall probe for in- situ film characterization. Three major areas of research will be impacted significantly by the facility, namely 1) solid state micro-sensors, 2) nanomechanics of materials, and 3) surfaces and interfaces in hetero-epitaxial oxide systems. In the sensor work, which has connections with local industry, the synthesis and processing of well-defined doped metal-oxide films will be developed with the goal of understanding and controlling the molecular scale mechanisms by which surface microstructure, dopant type, and operating temperature influence sensor performance. A broad based advanced materials synthesis and processing facility for the growth and fabrication of ceramic-based thin films will be operated for the study of solid state microsensors based on metal-oxide ceramic films. The nanomechanics of these ceramic thin films will be studied, as well as the surfaces and interfaces occurring in heteroepitaxial oxide systems.
Rights and Access Note
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Recommended Citation
Lad, Robert J.; Vetelino, John F.; Unertl, William; Dwyer, Daniel; and Frankel, David, "Acquisition of a Multi-User Thin Film Synthesis and Processing Facility" (2000). University of Maine Office of Research Administration: Grant Reports. 401.
https://digitalcommons.library.umaine.edu/orsp_reports/401
Included in
Rights Statement
Additional Participants
Senior Personnel
Thomas Christensen
George Bernhardt
Organizational Partners
Sensor Research and Development Corp
BIODE, Inc.
First Light Technology
Fairchild Semiconductor
University of New Hampshire
Oak Ridge National Laboratory
Sandia National Laboratory