Additional Participants

Senior Personnel

Thomas Christensen
George Bernhardt

Organizational Partners

Sensor Research and Development Corp
First Light Technology
Fairchild Semiconductor
University of New Hampshire
Oak Ridge National Laboratory
Sandia National Laboratory

Project Period

September 15, 1994-August 31, 1999

Level of Access

Open-Access Report

Grant Number


Submission Date



A state-of-the-art advanced materials synthesis and processing facility focusing on the growth and fabrication of ceramic- based thin film materials will be funded with the assistance of the Academic Research Infrastructure Program. The facility will include a multi-technique thin film materials synthesis chamber equipped with a microwave plasma source, effusion cells, electron beam evaporators, magnetron sputter sources, and a Kauffman ion source. Characterization capabilities will include in-situ reflection high energy electron diffraction (RHEED), mass spectrometry for controlling growth processes, X-ray photoelectron spectroscopy (XPS), and a novel Hall probe for in- situ film characterization. Three major areas of research will be impacted significantly by the facility, namely 1) solid state micro-sensors, 2) nanomechanics of materials, and 3) surfaces and interfaces in hetero-epitaxial oxide systems. In the sensor work, which has connections with local industry, the synthesis and processing of well-defined doped metal-oxide films will be developed with the goal of understanding and controlling the molecular scale mechanisms by which surface microstructure, dopant type, and operating temperature influence sensor performance. A broad based advanced materials synthesis and processing facility for the growth and fabrication of ceramic-based thin films will be operated for the study of solid state microsensors based on metal-oxide ceramic films. The nanomechanics of these ceramic thin films will be studied, as well as the surfaces and interfaces occurring in heteroepitaxial oxide systems.

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